Fabrication of ridge waveguide in X-cut LiNbO3 for nonlinear optic applications

S. Pal; B. K. Das

doi:10.1117/12.898374

23 August 2011 Fabrication of ridge waveguide in X-cut LiNbO₃ for nonlinear optic applications

S. Pal, B. K. Das

Proceedings Volume 8173, Photonics 2010: Tenth International Conference on Fiber Optics and Photonics; 81730W (2011) https://doi.org/10.1117/12.898374
Event: International Conference on Fiber Optics and Photonics, 2010, Guwahati, India

Abstract

Theoretical simulation shows that APE:LiNbO₃ ridge waveguide can support a more tightly confined fundamental mode than that of conventional APE or Ti-indiffused channel waveguides. Successful demonstration of such waveguides on the surface of LiNbO₃ crystal will have potential impact in the area of nonlinear integrated optics. However, the fabrication process of ridge structures has appeared to be a challenging task. The ridge structures on the surface of X-cut LiNbO₃ crystal were fabricated by wet/dry etching process using various recipes and corresponding surface morphologies have been closely investigated.

Citation Download Citation

S. Pal and B. K. Das "Fabrication of ridge waveguide in X-cut LiNbO₃ for nonlinear optic applications", Proc. SPIE 8173, Photonics 2010: Tenth International Conference on Fiber Optics and Photonics, 81730W (23 August 2011); https://doi.org/10.1117/12.898374

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