Sensors based on SAW and FBAR technologies

L. García-Gancedo; W. I. Milne; J. K. Luo; A. J. Flewitt

doi:10.1117/12.2022205

9 August 2013 Sensors based on SAW and FBAR technologies

L. García-Gancedo, W. I. Milne, J. K. Luo, A. J. Flewitt

Proceedings Volume 8793, Fourth International Conference on Smart Materials and Nanotechnology in Engineering; 879308 (2013) https://doi.org/10.1117/12.2022205
Event: Fourth International Conference on Smart Materials and Nanotechnology in Engineering, 2013, Gold Coast, Australia

Abstract

Over the last few years a number of sensing platforms are being investigated for their use in drug development, microanalysis or medical diagnosis. Lab-on-a-chip (LOC) are devices integrating more than one laboratory functions on a single device chip of a very small size, and typically consist of two main components: microfluidic handling systems and sensors. The physical mechanisms that are generally used for microfluidics and sensors are different, hence making the integration of these components difficult and costly. In this work we present a lab-on-a-chip system based on surface acoustic waves (for fluid manipulation) and film bulk acoustic resonators (for sensing). Coupling surface acoustic waves into liquids induces acoustic streaming and motion of micro-droplets, whilst it is well-known that bulk acoustic waves can be used to fabricate microgravimetric sensors. Both technologies offer exceptional sensitivity and can be fabricated from piezoelectric thin films deposited on Si substrates, reducing the fabrication time/cost of the LOC devices.

Citation Download Citation

L. García-Gancedo, W. I. Milne, J. K. Luo, and A. J. Flewitt "Sensors based on SAW and FBAR technologies", Proc. SPIE 8793, Fourth International Conference on Smart Materials and Nanotechnology in Engineering, 879308 (9 August 2013); https://doi.org/10.1117/12.2022205

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