Determination of the nucleation region of Si particles produced by pulsed-laser deposition in Monte Carlo simulation

Aili Qin; Lizhi Chu; Zechao Deng; Xiaolong Zhang; Yinglong Wang

doi:10.1117/12.2180746

4 May 2015 Determination of the nucleation region of Si particles produced by pulsed-laser deposition in Monte Carlo simulation

Aili Qin, Lizhi Chu, Zechao Deng, Xiaolong Zhang, Yinglong Wang

Author Affiliations +

Proceedings Volume 9543, Third International Symposium on Laser Interaction with Matter; 95430T (2015) https://doi.org/10.1117/12.2180746
Event: Third International Symposium on Laser Interaction with Matter, 2014, Jiangsu, China

Abstract

The nucleation and growth of Si nanoparticle produced by pulsed laser ablation in helium gas ambient is investigated via direct simulation Monte Carlo method with a real physical scale of target-substrate configuration. The nucleation area is important for the formation of Si nanoparticles, and the average size and size distribution of Si nanoparticles formed in this region depend on its range. The narrower the nucleation area and, therefore, the less the maximum times of collisions between Si atoms in the region, the smaller and the more uniform the Si nanoparticles. A nucleation and growth process is clearly observed. It is shown that the nucleation region and the nucleation growth internal is changing with time. The ambient gas pressure is important to nucleation region. The suitable pressure range under certain conditions is given and our simulated results are approximately in agreement with the previous experimental data.

Citation Download Citation

Aili Qin, Lizhi Chu, Zechao Deng, Xiaolong Zhang, and Yinglong Wang "Determination of the nucleation region of Si particles produced by pulsed-laser deposition in Monte Carlo simulation", Proc. SPIE 9543, Third International Symposium on Laser Interaction with Matter, 95430T (4 May 2015); https://doi.org/10.1117/12.2180746

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available