Research on auto-centering device in surface defects evaluation system of large spherical optics

Yihui Zhang; Yongying Yang; Fan Wu; Huiting Chai; Kai Yan; Lin Zhou; Yang Li; Dong Liu; Jian Bai; Yibing Shen; Pin Cao

doi:10.1117/12.2243299

27 September 2016 Research on auto-centering device in surface defects evaluation system of large spherical optics

Yihui Zhang, Yongying Yang, Fan Wu, Huiting Chai, Kai Yan, Lin Zhou, Yang Li, Dong Liu, Jian Bai, Yibing Shen, Pin Cao

Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96841N (2016) https://doi.org/10.1117/12.2243299
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

For the Spherical Surface Defects Evaluation System (SSDES), lens centering is essential to obtain the precise scanning trace and defect features without mismatch. Based on a combination of auto-collimating microscopy and Computer-Aided Alignment (CAA), an auto-centering system that can measure the deviation of large spherical center with respect to a reference rotation axis rapidly and accurately is established in this paper. The auto-centering system allows the closedloop feedback control of spherical center according to the different images of the crosshair reticle on CCD. Image entropy algorithm is employed to evaluate image clarity determined by the auto-focus experiment of 50μm step-length. Subsequently, an improved algorithm that can search the crosshair center automatically is proposed to make the trajectory of crosshair images and the position of rotation axis more reliable based on original circle fitting algorithm by the least square method (LSM). The comparison results indicates to show the high accuracy and efficiency of the proposed fitting method with LSM.

Citation Download Citation

Yihui Zhang, Yongying Yang, Fan Wu, Huiting Chai, Kai Yan, Lin Zhou, Yang Li, Dong Liu, Jian Bai, Yibing Shen, and Pin Cao "Research on auto-centering device in surface defects evaluation system of large spherical optics", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96841N (27 September 2016); https://doi.org/10.1117/12.2243299

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KEYWORDS

Reticles

Spherical lenses

Charge-coupled devices

Image processing

Digital image processing

Image segmentation

Imaging systems

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