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17 March 2023 High transparency and resiliency free-form micro-optics fabricated by laser 3D nanolithography and post-processing solutions
Darius Gailevicius, Karolis Galvanauskas, Darija Astrauskyte, Rokas Žvirblis, Antanas Butkus, Giedrius Balčas, Lina Grinevičiūtė, Mangirdas Malinauskas
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Proceedings Volume PC12433, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI; PC1243305 (2023) https://doi.org/10.1117/12.2651280
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
We report on the 3D printing of high transparency and resiliency free-form micro-optics. The fabrication is realized employing combining femtosecond laser direct write 3D nanolithography (fs-LDW or a.k.a. two-photon polymerization) with high temperature calcination (sintering) and atomic layer deposition (ALD) techniques. The developed approach allows production of diverse single optical elements and stacked components ranging in dimensions from 10 to 100 µm. Produced micro-optic objects are characterized of their optical performance (focusing, imaging, transparency) and determining their laser induced damage threshold (LIDT). This opens novel applications of laser 3D printed microoptics under harsh conditions: radiation, temperature, acidic environment, pressure variations.
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Darius Gailevicius, Karolis Galvanauskas, Darija Astrauskyte, Rokas Žvirblis, Antanas Butkus, Giedrius Balčas, Lina Grinevičiūtė, and Mangirdas Malinauskas "High transparency and resiliency free-form micro-optics fabricated by laser 3D nanolithography and post-processing solutions", Proc. SPIE PC12433, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI, PC1243305 (17 March 2023); https://doi.org/10.1117/12.2651280
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KEYWORDS
Nanolithography
Micro optics
Transparency
Atomic layer deposition
3D printing
Nonimpact printing
Additive manufacturing
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