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Mantas Drazdys
at Ctr for Physical Sciences and Technology
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Publications (1)
Proceedings Article | 30 November 2023 Paper
Deposition of antireflective coatings on 3D micro-optics using atomic layer deposition
Proceedings Volume 12796, 1279609 (2023) https://doi.org/10.1117/12.2690946
KEYWORDS: Atomic layer deposition, Antireflective coatings, Coating, Thin films, Thin film deposition, Plasma, Micro optics, Fabrication, Surface roughness
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