PROCEEDINGS VOLUME 7470
25TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE | 12-15 JANUARY 2009
25th European Mask and Lithography Conference
Editor Affiliations +
IN THIS VOLUME

13 Sessions, 43 Papers, 0 Presentations, 0 Posters
EUV I  (4)
NIL  (4)
Metrology  (4)
ML2  (4)
EUV II  (3)
25TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE
12-15 January 2009
Dresden, Germany
Front Matter: Volume 7470
Proceedings Volume 25th European Mask and Lithography Conference, 747001 (2009) https://doi.org/10.1117/12.834189
Plenary Session I
Proceedings Volume 25th European Mask and Lithography Conference, 747002 (2009) https://doi.org/10.1117/12.834186
Proceedings Volume 25th European Mask and Lithography Conference, 747003 (2009) https://doi.org/10.1117/12.835157
Plenary Session II
Proceedings Volume 25th European Mask and Lithography Conference, 747004 (2009) https://doi.org/10.1117/12.835795
Mask Business and Application
Proceedings Volume 25th European Mask and Lithography Conference, 747005 (2009) https://doi.org/10.1117/12.835796
Rolf Seltmann, Gert Burbach, Anne Parge, Jens Busch, Tino Hertzsch, Andre Poock, Francois Weisbuch, Andre Holfeld
Proceedings Volume 25th European Mask and Lithography Conference, 747006 (2009) https://doi.org/10.1117/12.835166
Simulation and Double Patterning
Proceedings Volume 25th European Mask and Lithography Conference, 747007 (2009) https://doi.org/10.1117/12.835168
A. El-Gamal, M. Al-lmam
Proceedings Volume 25th European Mask and Lithography Conference, 747008 (2009) https://doi.org/10.1117/12.835169
Proceedings Volume 25th European Mask and Lithography Conference, 747009 (2009) https://doi.org/10.1117/12.835171
Mask Cleaning/Haze
J. M. Foray, B. Bellet, S. HadjRabah, J. Palisson, E. Veran, M. Davenet, A. Favre, P. Sergent, M. Tissier, et al.
Proceedings Volume 25th European Mask and Lithography Conference, 74700A (2009) https://doi.org/10.1117/12.835172
Pavel Nesladek, Steve Osborne, Christian Kohl
Proceedings Volume 25th European Mask and Lithography Conference, 74700B (2009) https://doi.org/10.1117/12.835173
Joseph S. Gordon, Marianna Silova, Brid Connolly, Jeroen Huijbregtse, Nicolae Maxim, Larry Frisa, Christian Chovino, Colleen Weins
Proceedings Volume 25th European Mask and Lithography Conference, 74700C (2009) https://doi.org/10.1117/12.835174
EUV I
Proceedings Volume 25th European Mask and Lithography Conference, 74700D (2009) https://doi.org/10.1117/12.835175
Azadeh Farahzadi, Christian Wies, Rainer Lebert
Proceedings Volume 25th European Mask and Lithography Conference, 74700E (2009) https://doi.org/10.1117/12.835176
Bernd Bodermann, Matthias Wurm, Alexander Diener, Frank Scholze, Hermann Groß
Proceedings Volume 25th European Mask and Lithography Conference, 74700F (2009) https://doi.org/10.1117/12.835177
Eelco van Setten, Sjoerd Lok, Joep van Dijk, Cemil Kaya, Koen van Ingen Schenau, Kees Feenstra, Hans Meiling, Christian Wagner
Proceedings Volume 25th European Mask and Lithography Conference, 74700G (2009) https://doi.org/10.1117/12.835178
NIL
Proceedings Volume 25th European Mask and Lithography Conference, 74700H (2009) https://doi.org/10.1117/12.835179
Proceedings Volume 25th European Mask and Lithography Conference, 74700I (2009) https://doi.org/10.1117/12.835180
Proceedings Volume 25th European Mask and Lithography Conference, 74700J (2009) https://doi.org/10.1117/12.835181
A. Mayer, N. Bogdanski, S. Möllenbeck, H.-C. Scheer
Proceedings Volume 25th European Mask and Lithography Conference, 74700K (2009) https://doi.org/10.1117/12.835182
Metrology
M. Arnz, G. Klose, G. Troll, D. Beyer, A. Mueller
Proceedings Volume 25th European Mask and Lithography Conference, 74700L (2009) https://doi.org/10.1117/12.835183
C. G. Frase, D. Gnieser, K.-P. Johnsen, W. Häßler-Grohne, R. Tutsch, H. Bosse
Proceedings Volume 25th European Mask and Lithography Conference, 74700M (2009) https://doi.org/10.1117/12.835184
Karl-Heinrich Schmidt, Klaus-Dieter Röth, Frank Laske, Jochen Bender, Dieter Adam, Oliver Ache
Proceedings Volume 25th European Mask and Lithography Conference, 74700N (2009) https://doi.org/10.1117/12.835185
Robert de Kruif, Tasja van Rhee, Eddy van der Heijden
Proceedings Volume 25th European Mask and Lithography Conference, 74700O (2009) https://doi.org/10.1117/12.835186
ML2
U. Weidenmueller, P. Hahmann, M. Lemke, B. Schnabel, L. Pain, S. Manakli
Proceedings Volume 25th European Mask and Lithography Conference, 74700P (2009) https://doi.org/10.1117/12.835187
V. Kuiper, B. J. Kampherbeek, M. J. Wieland, G. de Boer, G. F. ten Berge, J. Boers, R. Jager, T. van de Peut, J. J. M. Peijster, et al.
Proceedings Volume 25th European Mask and Lithography Conference, 74700Q (2009) https://doi.org/10.1117/12.835188
L. Martin, S. Manakli, B. Icard, J. Pradelles, R. Orobtchouk, A. Poncet, L. Pain
Proceedings Volume 25th European Mask and Lithography Conference, 74700R (2009) https://doi.org/10.1117/12.835189
R. Galler, D. Melzer, J. Nowotny, K. Kroenert, M. Krueger, M. Suelzle, B. Papenfuss, C. Wagner, U. Baetz, et al.
Proceedings Volume 25th European Mask and Lithography Conference, 74700S (2009) https://doi.org/10.1117/12.835190
Inspection and Pattern Generation
Ernesto Villa, Luca Sartelli, Hiroyuki Miyashita, Frank Sundermann, Stuart Gough, Felix Dufaye, Astrid Sippel
Proceedings Volume 25th European Mask and Lithography Conference, 74700T (2009) https://doi.org/10.1117/12.835191
Shad Hedges, Chin Le, Mark Eickhoff, Mark Wylie, Tim Simmons, Venugopal Vellanki, Jeff McMurran
Proceedings Volume 25th European Mask and Lithography Conference, 74700U (2009) https://doi.org/10.1117/12.835192
Thomas Jakubski, Michal Piechoncinski, Raphael Moses, Bharathi Bugata, Heiko Schmalfuss, Ines Köhler, Jan Lisowski, Jens Klobes, Robert Fenske
Proceedings Volume 25th European Mask and Lithography Conference, 74700V (2009) https://doi.org/10.1117/12.835193
H. Christopher Hamaker, Matthew J. Jolley, Andrew D. Berwick
Proceedings Volume 25th European Mask and Lithography Conference, 74700W (2009) https://doi.org/10.1117/12.835194
EUV II
Patrick Kearney, C. C. Lin, Takashi Sugiyama, Henry Yun, Rajul Randive, Ira Reiss, Alan Hayes, Paul Mirkarimi, Eberhard Spiller
Proceedings Volume 25th European Mask and Lithography Conference, 74700X (2009) https://doi.org/10.1117/12.835195
Proceedings Volume 25th European Mask and Lithography Conference, 74700Y (2009) https://doi.org/10.1117/12.835196
Abbas Rastegar, Sean Eichenlaub, Arun John Kadaksham, Matt House, Brian Cha, Henry Yun
Proceedings Volume 25th European Mask and Lithography Conference, 74700Z (2009) https://doi.org/10.1117/12.835197
Poster Session
J. M. Foray, C. Rude, J. Palisson, M. Davenet, A. Favre, D. Cheung, F. Dufaye, S. Gough, P. Richteiger, et al.
Proceedings Volume 25th European Mask and Lithography Conference, 747010 (2009) https://doi.org/10.1117/12.835198
A. Paraskevopoulos, S.-H. Voss, M. Talmi, G. Walf
Proceedings Volume 25th European Mask and Lithography Conference, 747011 (2009) https://doi.org/10.1117/12.835200
K. Tada, M. Yasuda, N. Fujii, H. Kawata, Y. Hirai
Proceedings Volume 25th European Mask and Lithography Conference, 747012 (2009) https://doi.org/10.1117/12.835201
Alexander Serebryakov, Lionel Brige, Emmanuel Boisseau, Eric Peloquin, Vincent Coutellier, Jonathan Planchot
Proceedings Volume 25th European Mask and Lithography Conference, 747013 (2009) https://doi.org/10.1117/12.835203
Proceedings Volume 25th European Mask and Lithography Conference, 747014 (2009) https://doi.org/10.1117/12.835202
S. Geisler, J. Bauer, U. Haak, K. Schulz, G. Old, E. Matthus
Proceedings Volume 25th European Mask and Lithography Conference, 747015 (2009) https://doi.org/10.1117/12.835204
Ute Buttgereit, Robert Birkner, Robert Stelzner
Proceedings Volume 25th European Mask and Lithography Conference, 747016 (2009) https://doi.org/10.1117/12.835205
K. Keil, P. Jaschinsky, C. Hohle, K.-H. Choi, R. Schneider, M. Tesauro, F. Thrum, R. Zimmermann, J. Kretz
Proceedings Volume 25th European Mask and Lithography Conference, 747017 (2009) https://doi.org/10.1117/12.835206
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