Line-field white light interferometer with tunable-path-difference source controlled by fiber stretcher

Sunwoo Woo; Jaeheung Kim; Chang-Seok Kim

doi:10.1117/12.2651017

9 March 2023 Line-field white light interferometer with tunable-path-difference source controlled by fiber stretcher

Sunwoo Woo, Jaeheung Kim, Chang-Seok Kim

Proceedings Volume PC12428, Photonic Instrumentation Engineering X; PC1242801 (2023) https://doi.org/10.1117/12.2651017
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

White light interferometry (WLI) is the 3D imaging sensor based on interferometry to obtain depth information by acquiring constructive interference. It allows a deep scanning range in high resolution while there are still limitations that lead to a low imaging speed and vibration from the mechanical movement. In this study, we resolved the vibration problem by isolating the depth scanning part in the tunable-path-difference source (TPDS) with a fiber stretcher from the interferometric measurement part. We also applied line-field interferometry to improve scanning speed and to image not only flat surfaces but also curved objects in variable fields of view.

Conference Presentation

Citation Download Citation

Sunwoo Woo, Jaeheung Kim, and Chang-Seok Kim "Line-field white light interferometer with tunable-path-difference source controlled by fiber stretcher", Proc. SPIE PC12428, Photonic Instrumentation Engineering X, PC1242801 (9 March 2023); https://doi.org/10.1117/12.2651017

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