Paper
15 November 1983 A New Optical Method For The Measurement Of Surface Roughness Of Technical Surfaces
R.-J. Ahlers, H. J. Warnecke
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Abstract
As the standards of quality of a product increase, so also does the importance of the roughness measurement of technical surfaces. In the near future the most important methods for on-line measurement will be those, that work on a non-tactile basis. In this report, a new optical method is presented and described from a more experimenta] point of view to emphasize the application-oriented development of this electro-optical measuring device. Beginning with some remarks on the more theoretical characteristics, experiment results will be presented that have been obtained from both standardized and technical surfaces. The results reveal the ability to measure surface roughness in the range of approximately Ra = 0,06-10 um.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R.-J. Ahlers and H. J. Warnecke "A New Optical Method For The Measurement Of Surface Roughness Of Technical Surfaces", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); https://doi.org/10.1117/12.936342
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KEYWORDS
Sensors

Radium

Surface roughness

Phase contrast

Superposition

Measurement devices

Signal processing

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