Projection Interference Fringes Microscope

O. D. D. Soares; S. P. Almeida

doi:10.1117/12.936355

15 November 1983 Projection Interference Fringes Microscope

O. D. D. Soares, S. P. Almeida

Proceedings Volume 0429, Precision Surface Metrology; (1983) https://doi.org/10.1117/12.936355
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

Surface topography is a topic of relevant interest to science, technology and industry. The method of projected interference fringes is reconsidered in view of applications to non-optical surface microscopic topography. Completion of the analysis of the limitations of the technique is continued in discussing method implementation with computer image processing techniques. Shifting of the fringe pattern by phase modulation to eliminate interpretation ambiguities and the discontinuous observation of the surface is examined for automatization of profile evaluation. Amplitude modulation for pulsed illumination is introduced combined with synchronized video-recording to the metrology of transient events.

Citation Download Citation

O. D. D. Soares and S. P. Almeida "Projection Interference Fringes Microscope", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); https://doi.org/10.1117/12.936355

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