High Precision And Miniaturized Mark Position Sensing Methods For 3-D Shape Measurement

Masanori Idesawa

doi:10.1117/12.947600

16 January 1989 High Precision And Miniaturized Mark Position Sensing Methods For 3-D Shape Measurement

Masanori Idesawa

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947600
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

A high precision mark position sensing method for image position sensing detector (PSD) with kaleido scopic mirror tunnel (KM-PSM) is introduced. To increase the image position detecting precision of a sensor element itself, hybrid ( analogue and digital ) type position sensitive device (R-HPSD) is invented. In order to realize high precision and miniaturized 3-D position measuring system, 1-D mark direction sensing method (PM-DSM) which consist of a 1-D image position sensing element, a cylindrical lens and a parallel mirror tunnel is proposed. Furtheremore, an optical range sensing method (RORS) which is suitable to realize a miniaturized optical range sensing probe based on the triangulation, is proposed. In addition, an optical range sensing probe for advanced 3-D coordinates measuring machine is considered.

Citation Download Citation

Masanori Idesawa "High Precision And Miniaturized Mark Position Sensing Methods For 3-D Shape Measurement", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947600

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