High-density grating pair for displacement measurement

Changcheng Xiang; Changhe Zhou; Shubin Li; Zhumei Sun

doi:10.1117/12.2245658

31 October 2016 High-density grating pair for displacement measurement

Changcheng Xiang, Changhe Zhou, Shubin Li, Zhumei Sun

Proceedings Volume 10022, Holography, Diffractive Optics, and Applications VII; 1002211 (2016) https://doi.org/10.1117/12.2245658
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

A novel method of displacement measurement based on a high density grating pair is proposed. When a laser beam is incident normal to a closely placed high density grating pair, efficiencies of transmission diffraction orders will change periodically along with the relative displacement of the two gratings in the grating period direction. The period of efficiency changing is equal to the grating period, thus measurement of displacement in the grating period direction can be achieved by detecting the power of diffraction orders.

Citation Download Citation

Changcheng Xiang, Changhe Zhou, Shubin Li, and Zhumei Sun "High-density grating pair for displacement measurement", Proc. SPIE 10022, Holography, Diffractive Optics, and Applications VII, 1002211 (31 October 2016); https://doi.org/10.1117/12.2245658

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