Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing

Kazuhito Osawa; Masataka Yoshida; Yoshiki Nakata; Noriaki Miyanaga; Aiko Narazaki; Tatsuya Shoji; Yasuyuki Tsuboi

doi:10.1117/12.2253983

27 February 2017 Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing

Kazuhito Osawa, Masataka Yoshida, Yoshiki Nakata, Noriaki Miyanaga, Aiko Narazaki, Tatsuya Shoji, Yasuyuki Tsuboi

Author Affiliations +

Proceedings Volume 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII; 100911C (2017) https://doi.org/10.1117/12.2253983
Event: SPIE LASE, 2017, San Francisco, California, United States

Abstract

We demonstrated beam shaping to top-flat and square by phase-only Spatial Light Modulator (SLM) and spatial frequency filtering. Spatial phase distribution of a femtosecond laser beam was modulated by a phase grating pattern reflecting a transfer function for beam shaping. By filtering the higher spatial frequency component at Fourier plane in 4f system, the spatial amplitude distribution of the zero-order beam was shaped to top-flat and square. This result enables us to fabricate large area and uniform devices by using multi-shot processing.

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Kazuhito Osawa, Masataka Yoshida, Yoshiki Nakata, Noriaki Miyanaga, Aiko Narazaki, Tatsuya Shoji, and Yasuyuki Tsuboi "Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing", Proc. SPIE 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII, 100911C (27 February 2017); https://doi.org/10.1117/12.2253983

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