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Seong-Sue Kim, Roman Chalykh, Hoyeon Kim, Seungkoo Lee, Changmin Park, Myungsoo Hwang, Joo-On Park, Jinhong Park, Hocheol Kim, Jinho Jeon, Insung Kim, Donggun Lee, Jihoon Na, Jungyeop Kim, Siyong Lee, Hyunwoo Kim, Seok-Woo Nam, "Progress in EUV lithography toward manufacturing," Proc. SPIE 10143, Extreme Ultraviolet (EUV) Lithography VIII, 1014306 (24 March 2017);