Author Affiliations +
Erik Verduijn,1 Pawitter Mangat,1 Obert Wood,1 Jed Rankin,1 Yulu Chen,1 Francis Goodwin,1 Renzo Capelli,2 Sascha Perlitz,2 Dirk Hellweg,2 Ravi Bonam,3 Shravan Matham,3 Nelson Felix,3 Daniel Corliss3
1GLOBALFOUNDRIES Inc. (United States)
2Carl Zeiss SMT GmbH (Germany)
3IBM Corp. (United States)