Author Affiliations +
Seiji Nagahara,1 Michael Carcasi,2 Gosuke Shiraishi,3 Hisashi Nakagawa,4 Satoshi Dei,5 Takahiro Shiozawa,6 Kathleen Nafus,7 Danilo De Simone,8 Geert Vandenberghe,8 Hans-Jürgen Stock,9 Bernd Küchler,9 Masafumi Hori,5 Takehiko Naruoka,4 Tomoki Nagai,4 Yukie Minekawa,3 Tomohiro Iseki,3 Yoshihiro Kondo,3 Kosuke Yoshihara,3 Yuya Kamei,6 Masaru Tomono,3 Ryo Shimada,3 Serge Biesemans,10 Hideo Nakashima,1 Philippe Foubert,8 Elizabeth Buitrago,11 Michaela Vockenhuber,11 Yasin Ekinci,11 Akihiro Oshima,12 Seiichi Tagawa12
1Tokyo Electron Ltd. (Japan)
2Tokyo Electron America, Inc. (United States)
3Tokyo Electron Kyushu Ltd. (Japan)
4JSR Corp. (Japan)
5JSR Micro N.V. (Belgium)
6Tokyo Electron Kyushu Ltd. (Belgium)
7Tokyo Electron America, Inc. (Belgium)
8IMEC (Belgium)
9Synopsys GmbH (Germany)
10Tokyo Electron Europe Ltd. (Belgium)
11Paul Scherrer Institut (Switzerland)
12Osaka Univ. (Japan)