Calibration Of Optical And Mechanical Sensors By X-Ray Interferometry

Peter Becker; Peter Seyfried

doi:10.1117/12.949457

11 April 1989 Calibration Of Optical And Mechanical Sensors By X-Ray Interferometry

Peter Becker, Peter Seyfried

Proceedings Volume 1015, Micromachining Optical Components and Precision Engineering; (1989) https://doi.org/10.1117/12.949457
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

In a scanning x-ray interferometer cut from a silicon crystal the fringe period is equal to the lattice spacing selected (about 0.2 nm), which is well known in the unit of length. It is a practical instrument for high resolution measurements of small displacements, such as occur in investigations of high quality optical surfaces. In combination with an optical interferometer its fine scale having atomic distances as graduation marks, can be used for testing and for calibrating conventional interpolation techniques.

Citation Download Citation

Peter Becker and Peter Seyfried "Calibration Of Optical And Mechanical Sensors By X-Ray Interferometry", Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989); https://doi.org/10.1117/12.949457

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