Paper
22 December 2016 16-element photodiode array for the angular microdeflection detector and for stabilization of a laser radiation direction
Maciej Węgrzecki, Tadeusz Piotrowski, Jan Bar, Rafał Dobrowolski, Andrii Klimov, Helena Klos, Michał Marchewka, Marek Nieprzecki, Andrzej Panas, Piotr Prokaryn, Bartłomiej Seredyński, Andrzej Sierakowski, Wojciech Słysz, Dariusz Szmigiel, Michal Zaborowski
Author Affiliations +
Proceedings Volume 10175, Electron Technology Conference 2016; 101750Z (2016) https://doi.org/10.1117/12.2257558
Event: Electron Technology Conference ELTE 2016, 2016, Wisla, Poland
Abstract
In this paper, the design and technology of two types of 16-element photodiode arrays is described. The arrays were developed by the ITE and are to be used in detection of microdeflection of laser radiation at the Institute of Metrology and Biomedical Engineering in the Faculty of Mechatronics of Warsaw University of Technology.

The electrical and photoelectrical parameters of the arrays are presented.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Maciej Węgrzecki, Tadeusz Piotrowski, Jan Bar, Rafał Dobrowolski, Andrii Klimov, Helena Klos, Michał Marchewka, Marek Nieprzecki, Andrzej Panas, Piotr Prokaryn, Bartłomiej Seredyński, Andrzej Sierakowski, Wojciech Słysz, Dariusz Szmigiel, and Michal Zaborowski "16-element photodiode array for the angular microdeflection detector and for stabilization of a laser radiation direction", Proc. SPIE 10175, Electron Technology Conference 2016, 101750Z (22 December 2016); https://doi.org/10.1117/12.2257558
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KEYWORDS
Photovoltaics

Photodiodes

Photomasks

Sensors

Aluminum

Laser applications

Laser metrology

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