Parameter identification from frequency response of MEMS energy harvesters

Binh Duc Truong; Cuong Phu Le; Einar Halvorsen

doi:10.1117/12.2264094

2 June 2017 Parameter identification from frequency response of MEMS energy harvesters

Binh Duc Truong, Cuong Phu Le, Einar Halvorsen

Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 102460U (2017) https://doi.org/10.1117/12.2264094
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

In this study, we present theoretical analysis and numerical results on a simple technique for extracting unknown model parameters for MEMS electrostatic energy harvesters. We show that the frequency response can be utilized in a least-squares minimization scheme to estimate the damping coefficient, mechanical stiffness and transducer/load parasitic capacitances. The accuracy of the method is tested by application to simulated cases of linear and non-linear harvesters. A single data sweep from such a pseudo-experiment suffices to determine the unknown parameters of the electromechanical model with accuracy. The method is shown to work satisfactorily for both linear and nonlinear devices.

Conference Presentation

Citation Download Citation

Binh Duc Truong, Cuong Phu Le, and Einar Halvorsen "Parameter identification from frequency response of MEMS energy harvesters", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 102460U (2 June 2017); https://doi.org/10.1117/12.2264094

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