Sampling considerations for semiconductor manufacture

Scott M. Ashkenaz

doi:10.1117/12.187458

1 July 1994 Sampling considerations for semiconductor manufacture

Scott M. Ashkenaz

Author Affiliations +

Proceedings Volume 10274, Handbook of Critical Dimension Metrology and Process Control: A Critical Review; 102740G (1994) https://doi.org/10.1117/12.187458
Event: Microelectronic Processing '93, 1993, Monterey, CA, United States

Abstract

Data collection is implicit in experimentation on and control of semiconductor manufacturing processes, but is often ignored for its effect on the outcome of testing. Improper sampling can increase the cost of testing, either by testing too much, or by increasing the risk of reaching a wrong conclusion; the costs can be significantly more than the cost of measurement, in some cases approaching several million dollars. This paper reviews methods and patterns of sampling. Issues associated with the nested process characteristics of semiconductor manufacturing are discussed, with specific attention to typical distributions. Sample size effects and recommendations are reviewed. The cost of uncertainty associated with sampling is examined. The paper also includes definitions of conunonly-used statistics and tests.

Citation Download Citation

Scott M. Ashkenaz "Sampling considerations for semiconductor manufacture", Proc. SPIE 10274, Handbook of Critical Dimension Metrology and Process Control: A Critical Review, 102740G (1 July 1994); https://doi.org/10.1117/12.187458

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE