Ellipsometry as a characterization technique

Vo-Van Truong; Le-quang Nguyen

doi:10.1117/12.279849

30 July 1997 Ellipsometry as a characterization technique

Vo-Van Truong, Le-quang Nguyen

Author Affiliations +

Proceedings Volume 10291, Materials Characterization and Optical Probe Techniques: A Critical Review; 102910L (1997) https://doi.org/10.1117/12.279849
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

A brief historical background of ellipsometry is given, followed by a detailed assessment of its current status and future development. Spectroscopic ellipsometry in the near UV-VIS is now a well-established characterization technique, and its extension to the IR range is quickly reaching a mature state. Other important developments in both theory and instrumentation in the last decade are leading to better and faster in situ, real-time and imaging ellipsometry. Selected works from recent literature are presented to illustrate not only new development trends in the field but also other well-known applications of ellipsometry as a characterization technique.

Citation Download Citation

Vo-Van Truong and Le-quang Nguyen "Ellipsometry as a characterization technique", Proc. SPIE 10291, Materials Characterization and Optical Probe Techniques: A Critical Review, 102910L (30 July 1997); https://doi.org/10.1117/12.279849

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