Technology of proximal probe lithography: an overview

John A. Dagata; Christie R. Marrian

doi:10.1117/12.183184

3 October 1993 Technology of proximal probe lithography: an overview

John A. Dagata, Christie R. Marrian

Proceedings Volume 10310, Technology of Proximal Probe Lithography; 1031002 (1993) https://doi.org/10.1117/12.183184
Event: SPIE Institutes for Advanced Optical Technologies 10, 1993, Bellingham, WA, United States

There is no online version at this time. The PDF is only available to people who have bought the paper or have a subscription.

Citation Download Citation

John A. Dagata and Christie R. Marrian "Technology of proximal probe lithography: an overview", Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031002 (3 October 1993); https://doi.org/10.1117/12.183184

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available