Tunable laser diode using partially intermixed InGaAsP multiple quantum well

Thamer Tabbakh; Patrick LiKamWa

doi:10.1117/12.2297285

16 February 2018 Tunable laser diode using partially intermixed InGaAsP multiple quantum well

Thamer Tabbakh, Patrick LiKamWa

Proceedings Volume 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII; 105190H (2018) https://doi.org/10.1117/12.2297285
Event: SPIE LASE, 2018, San Francisco, California, United States

Abstract

In this work, a two-section wavelength tunable laser diode is demonstrated using an InGaAsP multiple quantum well heterostructure. The laser diode consists of two sections with different bandgap energies achieved using selective area intermixing of the MQW. Using plasma enhanced chemical vapor deposition (PECVD), half of the sample is coated with a 30nm silicon nitride (SiN_x) film followed by a 200nm thick overlay of silicon oxynitride (SiO_xN_y) film over the entire sample. The whole sample is then thermally annealed at 750°C for 30s, and that results in the SiO_xN_y covered section experiencing a narrowing of the bandgap energy, while leaving the SiN_xcovered section practically unchanged. A laser stripe is fabricated that passes through both MQW sections. The wavelength of laser operation can then be tuned by varying the injected current levels applied separately to the two sections. The obtained tuning range was 40 nm spanning from 1538 nm to 1578 nm.

Citation Download Citation

Thamer Tabbakh and Patrick LiKamWa "Tunable laser diode using partially intermixed InGaAsP multiple quantum well", Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 105190H (16 February 2018); https://doi.org/10.1117/12.2297285

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available