The development of an SC1 removable si-anti-reflective-coating

Shintaro Yamada; Iou-Sheng Ke; Charlotte Cutler; Li Cui; Paul LaBeaume; Daniel Greene; Bhooshan Popere; Chris Sullivan; JoAnne Leonard; Suzanne Coley; Sabrina Wong; Owendi Ongayi; Jim Cameron; Michael B. Clark; Thomas C. Fitzgibbons

doi:10.1117/12.2297687

13 March 2018 The development of an SC1 removable si-anti-reflective-coating

Shintaro Yamada, Iou-Sheng Ke, Charlotte Cutler, Li Cui, Paul LaBeaume, Daniel Greene, Bhooshan Popere, Chris Sullivan, JoAnne Leonard, Suzanne Coley, Sabrina Wong, Owendi Ongayi, Jim Cameron, Michael B. Clark, Thomas C. Fitzgibbons

Author Affiliations +

Proceedings Volume 10586, Advances in Patterning Materials and Processes XXXV; 105860L (2018) https://doi.org/10.1117/12.2297687
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

A trilayer stack of spin-on-carbon (SOC), silicon anti-reflective coating (SiARC) and photoresist (PR) is often used to enable high resolution implant layers for integrated circuit manufacturing. Damage to substrates from SiARC removal using dry etching or aqueous hydrogen fluoride has increased the demand for innovative SiARC materials for implant lithography process. Wet strippable SiARCs (WS-SiARCs) capable of stripping under mild conditions such as SC1 (ammonium hydroxide/hydrogen peroxide/water) while maintaining key performance metrics of standard SiARCs is highly desirable. Minimizing the formation of Si-O-Si linkages by introducing organic crosslink sites was effective to impart SC1 solubility particularly after O2 dry etching. Incorporation of acidic groups onto the crosslinking site further improved SC1 solubility. A new siloxane polymer architecture that has SC1 active functionality in the polymer backbone was developed to further enhance SC1 solubility. A new SiARC formulation based on the new siloxane polymer achieved equivalent lithographic performances to a classic SiARC and SC1 strip rate >240Å/min under a relatively low concentration SC1 condition such as ammonium hydroxide/hydrogen peroxide/water=1/1/40.

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Shintaro Yamada, Iou-Sheng Ke, Charlotte Cutler, Li Cui, Paul LaBeaume, Daniel Greene, Bhooshan Popere, Chris Sullivan, JoAnne Leonard, Suzanne Coley, Sabrina Wong, Owendi Ongayi, Jim Cameron, Michael B. Clark, and Thomas C. Fitzgibbons "The development of an SC1 removable si-anti-reflective-coating", Proc. SPIE 10586, Advances in Patterning Materials and Processes XXXV, 105860L (13 March 2018); https://doi.org/10.1117/12.2297687

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