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1 December 2017 Infrared wire-grid polarizer with sol-gel antireflection films on both sides
Itsunari Yamada, Yoshiro Ishihara
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Proceedings Volume 10603, Photonics, Devices, and Systems VII; 106030U (2017) https://doi.org/10.1117/12.2288835
Event: Photonics Prague 2017, 2017, Prague, Czech Republic
Abstract
We fabricated an infrared wire-grid polarizer with the high transverse magnetic (TM) polarization transmittance and high extinction ratio by soft imprint lithography, sol-gel method, and Al shadow coating processes. A zilconia film was coated on Si substrate by using sol-gel method and spin coating method. Then, sol-gel zirconia grating was formed on the back side using imprinting using a silicone mold. The polarizer was produced by depositing Al obliquely on the grating. The TM transmittance of the fabricated element was greater than 80% at a wavelength of 4.8 μm. The sol-gel zilconia films acted as antireflection films. The extinction ratio exceeded 26 dB at its wavelength.
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Itsunari Yamada and Yoshiro Ishihara "Infrared wire-grid polarizer with sol-gel antireflection films on both sides", Proc. SPIE 10603, Photonics, Devices, and Systems VII, 106030U (1 December 2017); https://doi.org/10.1117/12.2288835
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KEYWORDS
Antireflective coatings
Infrared radiation
Polarizers
Sol-gels
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