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9 May 2018 Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
Maiko Girschikofsky, Manuel Rosenberger, Michael Förthner, Mathias Rommel, Lothar Frey, Ralf Hellmann
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Proceedings Volume 10680, Optical Sensing and Detection V; 106800P (2018) https://doi.org/10.1117/12.2303820
Event: SPIE Photonics Europe, 2018, Strasbourg, France
Abstract
We report on the fabrication of an optical, highly-flexible thin film bending sensor which is based on diffused channel waveguide Bragg gratings inscribed into sheets of OrmoStamp hybrid polymers. The inorganic-organic Ormocer thin films are prepared by non-structured UV-enhanced imprint lithography which allows the fabrication of sheet-like slab substrates with a desired thickness. By this approach, 120 μm thin and highly-flexible plane-parallel substrates are achieved. For the inscription of the diffused channel waveguide Bragg gratings, a fast and efficient single writing step concept is applied, which allows the simultaneous inscription of both waveguide and Bragg grating in only a few seconds. The accordingly fabricated waveguide Bragg gratings feature a defined Bragg reflection peak that lies within the telecom wavelength range and is well-suited for sensing applications that require a reliable detection and tracking of the reflected Bragg wavelength. The applicability of the thus achieved devices as highly-flexible thin film bending sensors is investigated by means of deflection measurements. Here, we found a quasi-instantaneous and highly-reproducible response of the diffused channel waveguide Bragg gratings reflected Bragg wavelength to even small deflections which features a linear dependency of 6.05 × 10-4 nm/μm on the sensors displacement.
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Maiko Girschikofsky, Manuel Rosenberger, Michael Förthner, Mathias Rommel, Lothar Frey, and Ralf Hellmann "Flexible thin film bending sensor based on Bragg gratings in hybrid polymers", Proc. SPIE 10680, Optical Sensing and Detection V, 106800P (9 May 2018); https://doi.org/10.1117/12.2303820
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KEYWORDS
Sensors
Bragg gratings
Polymers
Waveguides
Thin films
Fabrication
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