In this paper, we present a physical model of the DBO metrology which based on the Finite-Difference Time-Domain (FDTD) method. The basis and principles of model establishment was discussed. After adjusting the model parameters compatible with the actual measurement conditions, the metrology wavelengths which provide the best accuracy and robustness of DBO measurement can be selected through simulations. The results of our study will be demonstrated in this publication. |
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CITATIONS
Cited by 1 scholarly publication.
Overlay metrology
Finite-difference time-domain method
Diffraction
Metrology
Diffraction gratings
Reflection
Signal detection