Persistent homology analysis of complex high-dimensional layout configurations for IC physical designs

Yacoub Kureh; Vito Dai; Luigi Capodieci

doi:10.1117/12.2516583

20 March 2019 Persistent homology analysis of complex high-dimensional layout configurations for IC physical designs

Yacoub Kureh, Vito Dai, Luigi Capodieci

Proceedings Volume 10962, Design-Process-Technology Co-optimization for Manufacturability XIII; 1096207 (2019) https://doi.org/10.1117/12.2516583
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

Problems in simulation, in physical defects, or in electrical failures of the IC devices generally occur at the boundaries of dimensional tolerances, such as the minimum width and space. However, for layout configurations with four or more critical dimensions, simple minimums are insufficient to characterize dimensional coverage. Persistent homology is a multi-resolution analysis technique which robustly summarizes dimensional coverage. We apply this technique to compare dimensional coverage of IC design configurations, on the same layer, on different layers, and on different designs, yielding results both expected and unexpected based on manufacturing process and design rule knowledge.

Conference Presentation

Citation Download Citation

Yacoub Kureh, Vito Dai, and Luigi Capodieci "Persistent homology analysis of complex high-dimensional layout configurations for IC physical designs", Proc. SPIE 10962, Design-Process-Technology Co-optimization for Manufacturability XIII, 1096207 (20 March 2019); https://doi.org/10.1117/12.2516583

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available