Impact of process parameters on super-smooth surface of the fused silica created by magnetorheological finishing: simulation and experimental study

Jiabao Liu; Yunfei Zhang; Jianwei Ji; Xiaoyuan Li; Minheng Ye; Chao Wang

doi:10.1117/12.2524636

10 May 2019 Impact of process parameters on super-smooth surface of the fused silica created by magnetorheological finishing: simulation and experimental study

Jiabao Liu, Yunfei Zhang, Jianwei Ji, Xiaoyuan Li, Minheng Ye, Chao Wang

Author Affiliations +

Proceedings Volume 11068, Second Symposium on Novel Technology of X-Ray Imaging; 110681V (2019) https://doi.org/10.1117/12.2524636
Event: Second Symposium on Novel Technology of X-Ray Imaging, 2018, Hefei, China

Abstract

To achieve the super-smooth surface of the fused silica via using the magnetorheological finishing (MRF) technique, the synergistic effect of the rotational speed, viscosity, and working gap is well investigated. According to the pressure field simulation based on the two-dimensional Reynold equation, the working gap is of remarkable importance to the surface roughness among three parameters. Furthermore, such result is also revealed by the MRF experiment. Accordingly, the optimized process parameters are identified, and the final surface roughness is achieved as low as 0.22 nm.

Citation Download Citation

Jiabao Liu, Yunfei Zhang, Jianwei Ji, Xiaoyuan Li, Minheng Ye, and Chao Wang "Impact of process parameters on super-smooth surface of the fused silica created by magnetorheological finishing: simulation and experimental study", Proc. SPIE 11068, Second Symposium on Novel Technology of X-Ray Imaging, 110681V (10 May 2019); https://doi.org/10.1117/12.2524636

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