Paper
26 September 2019 Laboratory-based EUV spectroscopy for the characterization of thin films, membranes and nanostructured surfaces
Lukas Bahrenberg, Sven Glabisch, Moein Ghafoori, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Peter Loosen
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Abstract
The authors present studies on laboratory-based spectroscopy in the extreme ultraviolet (EUV) performed on a variety of thin film materials. This work focuses on spectroscopic measurements of EUV reflectivity and transmittance at wavelengths between 10 nm and 15 nm. The presented applications of the technique include the reconstruction of optical constants for novel materials such as EUV photoresists and absorbers, the characterization of EUV pellicles and ultrathin layer systems as well as the characterization of nanostructured surfaces.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lukas Bahrenberg, Sven Glabisch, Moein Ghafoori, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, and Peter Loosen "Laboratory-based EUV spectroscopy for the characterization of thin films, membranes and nanostructured surfaces", Proc. SPIE 11147, International Conference on Extreme Ultraviolet Lithography 2019, 111471X (26 September 2019); https://doi.org/10.1117/12.2536884
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KEYWORDS
Extreme ultraviolet

Spectroscopy

Reflectivity

Thin films

Extreme ultraviolet lithography

Interfaces

Metrology

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