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In this paper we present a novel sub-system for synchronizing motion of the galvanometer-based scanner and the XY stage system using a compact single controller that is independent of XY stage type or manufacturer. This integration directly utilizes the stage’s encoder output to compensate its motion in real time. Better than 10μm accuracy is demonstrated with various application patterns.
Keith J. Dowling,Bhavesh A. Bhut,Mark S. Lucas,Seethram Sivam,Yu John Hsu,Amit Shahar, andJin Li
"Position observer based galvanometer scanner and XY stage synchronization for large area processing", Proc. SPIE 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV, 1126713 (2 March 2020); https://doi.org/10.1117/12.2546482
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Keith J. Dowling, Bhavesh A. Bhut, Mark S. Lucas, Seethram Sivam, Yu John Hsu, Amit Shahar, Jin Li, "Position observer based galvanometer scanner and XY stage synchronization for large area processing," Proc. SPIE 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV, 1126713 (2 March 2020); https://doi.org/10.1117/12.2546482