Inner wall roughness of microchannel-plate-based x-ray optics in etching process

Jiao Lian; Xian Zhang; Yong Sun; Tiezhu Bo; Xiaoxuan Shi; Hua Cai; Chang Liu; Hui Liu

doi:10.1117/12.2545763

18 December 2019 Inner wall roughness of microchannel-plate-based x-ray optics in etching process

Jiao Lian, Xian Zhang, Yong Sun, Tiezhu Bo, Xiaoxuan Shi, Hua Cai, Chang Liu, Hui Liu

Proceedings Volume 11338, AOPC 2019: Optical Sensing and Imaging Technology; 1133820 (2019) https://doi.org/10.1117/12.2545763
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China

Abstract

Microchannel-plate-based x-ray optics is designed based on the principle that the lobster eye reflects rather than refracts the object. In practice, the inner wall of the square channel is not absolutely smooth but a bit rough, which causes diffuse scattering of X-rays, resulting in an exponential decline in reflectivity. In the present work, we investigated the morphology of channel inner wall in the etching process and the diffusion depth of the elements at the interface between channel and wall. The diffusion layer is a network-like structure, with the thickness of more than 1μm. As the acid-etching continues, the elements of the channel material in the network are gradually dissolved, and the remaining channel wall materials become the skeleton. After a long time of etching, the inner wall surface is columnar and the roughness is gradually increased. This study provides some guidelines for the preparation of ultra-smooth reflective surfaces.

Citation Download Citation

Jiao Lian, Xian Zhang, Yong Sun, Tiezhu Bo, Xiaoxuan Shi, Hua Cai, Chang Liu, and Hui Liu "Inner wall roughness of microchannel-plate-based x-ray optics in etching process", Proc. SPIE 11338, AOPC 2019: Optical Sensing and Imaging Technology, 1133820 (18 December 2019); https://doi.org/10.1117/12.2545763

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