Thermoelastic damping suppression method for MEMS resonant beam by introducing vertical slots

Rongjun Cheng; Yuhai Qi; Pengcheng Song; Qiangxian Huang; Liansheng Zhang

doi:10.1117/12.2548432

13 November 2019 Thermoelastic damping suppression method for MEMS resonant beam by introducing vertical slots

Rongjun Cheng, Yuhai Qi, Pengcheng Song, Qiangxian Huang, Liansheng Zhang

Proceedings Volume 11343, Ninth International Symposium on Precision Mechanical Measurements; 113430S (2019) https://doi.org/10.1117/12.2548432
Event: International Symposium on Precision Mechanical Measurements 2019, 2019, Chongqing, China

Abstract

Thermoelastic damping is one of the key factors affecting the quality factor of vacuum-encapsulated resonant devices. In order to suppress the influence of thermoelastic damping, vertical slots are introduced to the MEMS resonant beams. The heat flux inside the beams are expected to be reduced through local structural optimization, thus improving the quality factor. To verify the feasibility of the proposed method, the software of COMSOL is employed to explore the inhibition effect of structural parameters such as length, width and quantity of the slots on thermoelastic damping. The simulation results show that the thermoelastic damping decreases sharply and the quality factor are improved after the slots are introduced, and the effects are strongly related to the characteristic parameters of the slots.

Citation Download Citation

Rongjun Cheng, Yuhai Qi, Pengcheng Song, Qiangxian Huang, and Liansheng Zhang "Thermoelastic damping suppression method for MEMS resonant beam by introducing vertical slots", Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 113430S (13 November 2019); https://doi.org/10.1117/12.2548432

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