Dense structure and motion recovery from scanning electron microscope image sequences based on factorization

Stefan Töberg; Eduard Reithmeier

doi:10.1117/12.2556372

31 January 2020 Dense structure and motion recovery from scanning electron microscope image sequences based on factorization

Stefan Töberg, Eduard Reithmeier

Author Affiliations +

Proceedings Volume 11433, Twelfth International Conference on Machine Vision (ICMV 2019); 1143333 (2020) https://doi.org/10.1117/12.2556372
Event: Twelfth International Conference on Machine Vision, 2019, Amsterdam, Netherlands

Abstract

Scanning electron microscopes (SEM) are widely used to analyse the morphology of all kind of specimen providing high resolution image data. To overcome the two-dimensional limitation, a lot of effort has been put into the recovery of the hidden third dimension based on the acquired SEM images throughout the last decades. Especially methods based on photogrammetry were identified to yield qualitatively good reconstruction results. Nevertheless, precise quantitative 3D measurements still remain a challenge. One of the key problems is the robust estimation of the motion in the acquired image sequences. A possible solution is given by the factorization method for orthographic image streams. To evaluate the applicability of this algorithm on SEM image sequences, the motion for several sequences is estimated and compared to the stage settings. Furthermore, the method is extended to obtain a dense reconstruction from a stereo-pair based on the estimated rotations between the two views. The final reconstruction results are compared to reference measurements with a confocal laser scanning microscope for a quantitative evaluation.

Citation Download Citation

Stefan Töberg and Eduard Reithmeier "Dense structure and motion recovery from scanning electron microscope image sequences based on factorization", Proc. SPIE 11433, Twelfth International Conference on Machine Vision (ICMV 2019), 1143333 (31 January 2020); https://doi.org/10.1117/12.2556372

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available