HIRMES, SOFIA’s third generation science instrument, delivers spectroscopy at wavelengths between 25 and 122 um and resolving powers (RP) between 600 and 100,000. The detectors arrays are background-limited transition edge sensed bolometers. Here we focus on the development, testing, and performance of the series of 8 tunable cryogenic scanning Fabry-Perot interferometers (FPI) that deliver the imaging (RP = 2000), and the long-slit medium resolution (RP = 10,000) and high resolution (RP = 100,000) spectroscopic modes. The FPIs use free-standing metal meshes mirrors, flexible parallelogram translations stages, PZTs and/or cryomoters for displacement. and capacitive sensors for displacement measure.
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