Accurate mapping of dose variations on EUV scanners using dose-to-clear exposures and optical ellipsometry

Vineet Vijayakrishnan Nair; Lieve Van Look; Remko Aubert; Eric Hendrickx

doi:10.1117/12.2572993

13 October 2020 Accurate mapping of dose variations on EUV scanners using dose-to-clear exposures and optical ellipsometry

Vineet Vijayakrishnan Nair, Lieve Van Look , Remko Aubert, Eric Hendrickx

Author Affiliations +

Proceedings Volume 11517, Extreme Ultraviolet Lithography 2020; 115170O (2020) https://doi.org/10.1117/12.2572993
Event: SPIE Photomask Technology + EUV Lithography, 2020, Online Only

Abstract

In this work, we demonstrate the use of a scatterometry-based technique to accurately monitor the dose variations seen on an EUV scanner. By carefully setting up the exposure conditions and data analysis, we can separate scanner-driven dose effects, mask reflectivity changes and process variations into its individual components. These measurements have a very high repro and throughput allowing us to use this technique to both monitor and provide active feedback to improve overall EUV cluster stability. We have used this technique to achieve a day-to-day dose variation of +-0.5% over a 6-month period on the NXE:3400B at IMEC.

Conference Presentation

Citation Download Citation

Vineet Vijayakrishnan Nair, Lieve Van Look , Remko Aubert, and Eric Hendrickx "Accurate mapping of dose variations on EUV scanners using dose-to-clear exposures and optical ellipsometry", Proc. SPIE 11517, Extreme Ultraviolet Lithography 2020, 115170O (13 October 2020); https://doi.org/10.1117/12.2572993

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