Enhancement Of The Reflectivity Of Multilayer X-Ray Mirrors By Ion Polishing

Eberhard Spiller

doi:10.1117/12.962651

28 July 1989 Enhancement Of The Reflectivity Of Multilayer X-Ray Mirrors By Ion Polishing

Eberhard Spiller

Proceedings Volume 1160, X-Ray/EUV Optics for Astronomy and Microscopy; (1989) https://doi.org/10.1117/12.962651
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

The performance of multilayer x-ray mirrors is improved by smoothing the boundaries within the multilayer stack with ion bombardment at grazing angles of incidence. The process is applied to Co-C and to RhRu-C mirrors for normal incidence telescopes at λ = 64 and λ = 114Å and the reflectivity is increased by a factor of two in both cases. Accumulation of roughness during deposition is eliminated.

Citation Download Citation

Eberhard Spiller "Enhancement Of The Reflectivity Of Multilayer X-Ray Mirrors By Ion Polishing", Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); https://doi.org/10.1117/12.962651

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