Laser-fabricated axicons as an alternative to conventional optics for glass dicing

J. Dudutis; J. Pipiras; S. Schwarz; S. Rung; R. Hellmann; G. Račiukaitis; P. Gečys

doi:10.1117/12.2574836

5 March 2021 Laser-fabricated axicons as an alternative to conventional optics for glass dicing

J. Dudutis, J. Pipiras, S. Schwarz, S. Rung, R. Hellmann, G. Račiukaitis, P. Gečys

Proceedings Volume 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI; 116730D (2021) https://doi.org/10.1117/12.2574836
Event: SPIE LASE, 2021, Online Only

Abstract

Optical elements are usually fabricated via conventional well-established processes - milling, grinding and polishing. However, these techniques cannot fully satisfy the growing demand for miniaturized optics with tailored properties. An alternative technology is a laser-based fabrication, including the ultrashort laser ablation and the subsequent CO₂ laser polishing steps. Although this technique allows complex surface structuring, the fabricated optics require validation. In this contribution, we present the characterization of the laser-fabricated axicon from fused silica and comparison with the conventional element. We demonstrate that laser-fabricated axicon can generate the high-quality optical Bessel beam with a long non-diffractive length, which could be applied for 1 mm-thick glass intra-volume dicing. Furthermore, we demonstrate that the astigmatic aberrations, introduced via axicon tilt operation, allow generation of the asymmetrical intensity pattern, which could enhance the cleavability of modified glass sheets. The scribing process was optimized by the variation of processing parameters to minimize the force, required to separate modified glass sheets, using the fourpoint bending setup. Furthermore, the quality of the generated beam and volumetric scribing performance was compared to the conventional commercial oblate-tip axicon.

Conference Presentation

Citation Download Citation

J. Dudutis, J. Pipiras, S. Schwarz, S. Rung, R. Hellmann, G. Račiukaitis, and P. Gečys "Laser-fabricated axicons as an alternative to conventional optics for glass dicing", Proc. SPIE 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, 116730D (5 March 2021); https://doi.org/10.1117/12.2574836

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