Precisely positioned and scalable single-photon emitters (SPEs) are highly desirable for applications in quantum technology. We present single-photon-emitting atomistic defects in monolayers of MoS2 that can be generated by focused He-ion irradiation with few nanometers positioning accuracy. We discuss the optical properties of the emitters as well as the possibilities to implement them into photonic and optoelectronic devices. We showcase the advantages of the presented emitters with respect to atomistic positioning, scalability, long (microsecond) lifetime, and a homogenous emission energy within ensembles of the emitters. Moreover, we demonstrate that the emitters are stable in energy on a time scale exceeding several weeks, and that temperature cycling narrows the ensembles’ emission energy distribution.
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