Photosensivity of heterostructures produced by aerosol deposition of ZnMgO thin films on Si substrates

Vadim Morari; Eduard Monaico; Emil Rusu; Karin Leistner; Kornelius Nielsch; V. V. Ursaki; I. M. Tighineanu

doi:10.1117/12.2571189

31 December 2020 Photosensivity of heterostructures produced by aerosol deposition of ZnMgO thin films on Si substrates

Vadim Morari, Eduard Monaico, Emil Rusu, Karin Leistner, Kornelius Nielsch, V. V. Ursaki, I. M. Tighineanu

Proceedings Volume 11718, Advanced Topics in Optoelectronics, Microelectronics and Nanotechnologies X; 1171818 (2020) https://doi.org/10.1117/12.2571189
Event: Advanced Topics in Optoelectronics, Microelectronics and Nanotechnologies 2020, 2020, Online Only

Abstract

ZnMgO thin films were prepared on Si substrates by aerosol deposition method using zinc acetate and magnesium acetate as precursors. The obtained films were investigated by scanning electron microscopy (SEM), energy dispersive xray (EDX) and X-Ray Diffraction (XRD) analysis. SEM and EDX investigations showed that the produced thin films are homogeneous from the point of view of morphology and composition. The investigation of photosensitivity demonstrated that the heterostructures of ZnMgO thin films deposited on Si substrates are sensitive in a wide spectral range from ultraviolet (UV) to infrared (IR) radiation, with a highest sensitivity in the UV region.

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Vadim Morari, Eduard Monaico, Emil Rusu, Karin Leistner, Kornelius Nielsch, V. V. Ursaki, and I. M. Tighineanu "Photosensivity of heterostructures produced by aerosol deposition of ZnMgO thin films on Si substrates", Proc. SPIE 11718, Advanced Topics in Optoelectronics, Microelectronics and Nanotechnologies X, 1171818 (31 December 2020); https://doi.org/10.1117/12.2571189

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