Analysis of resolution enhancement through microsphere-assisted interferometry in the 3D spatial frequency domain

Lucie Hüser; Peter Lehmann

doi:10.1117/12.2593296

20 June 2021 Analysis of resolution enhancement through microsphere-assisted interferometry in the 3D spatial frequency domain

Lucie Hüser, Peter Lehmann

Author Affiliations +

Proceedings Volume 11782, Optical Measurement Systems for Industrial Inspection XII; 117820R (2021) https://doi.org/10.1117/12.2593296
Event: SPIE Optical Metrology, 2021, Online Only

Abstract

In optical metrology various approaches have been made in order to push the physical limitations of lateral resolution in microscopic and interferometric devices. Microsphere-assisted interferometry enables the measurement of structures well below Abbe’s resolution limit. In order to give an approach for analyzing the obtained measurement data, this study shows the transfer behavior in the three-dimensional spatial frequency domain. With the construction of an Ewald sphere further insight into the role of microspheres in the imaging process can be obtained. For improved analysis, selective illumination is applied to the select those parts of the field of view where the microsphere is located. Further improvement is achieved by appropriate windowing of the measurement data.

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Lucie Hüser and Peter Lehmann "Analysis of resolution enhancement through microsphere-assisted interferometry in the 3D spatial frequency domain", Proc. SPIE 11782, Optical Measurement Systems for Industrial Inspection XII, 117820R (20 June 2021); https://doi.org/10.1117/12.2593296

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