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In optical metrology various approaches have been made in order to push the physical limitations of lateral resolution in microscopic and interferometric devices. Microsphere-assisted interferometry enables the measurement of structures well below Abbe’s resolution limit. In order to give an approach for analyzing the obtained measurement data, this study shows the transfer behavior in the three-dimensional spatial frequency domain. With the construction of an Ewald sphere further insight into the role of microspheres in the imaging process can be obtained. For improved analysis, selective illumination is applied to the select those parts of the field of view where the microsphere is located. Further improvement is achieved by appropriate windowing of the measurement data.
Lucie Hüser andPeter Lehmann
"Analysis of resolution enhancement through microsphere-assisted interferometry in the 3D spatial frequency domain", Proc. SPIE 11782, Optical Measurement Systems for Industrial Inspection XII, 117820R (20 June 2021); https://doi.org/10.1117/12.2593296
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Lucie Hüser, Peter Lehmann, "Analysis of resolution enhancement through microsphere-assisted interferometry in the 3D spatial frequency domain," Proc. SPIE 11782, Optical Measurement Systems for Industrial Inspection XII, 117820R (20 June 2021); https://doi.org/10.1117/12.2593296