Paper
19 March 1990 Microwave Measurements on Patterned High Temperature Superconducting Thin Film Circuits
E. Belohoubek, D. Kalokitis, A. Fathy, V. Pendrick, R. Brown, J. Matey, L. Nazar, B. Wilkens, T. Venkatesan, A. Inam, X. D. Wu, B. Dutta
Author Affiliations +
Proceedings Volume 1187, Processing of Films for High Tc Superconducting Electronics; (1990) https://doi.org/10.1117/12.965177
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States
Abstract
The microwave surface resistance and dispersion of laser deposited YBaCuO films patterned in the form of a meander line have been measured from L through Ku-band at temperatures from 5 to 90K. Surface resistance values below 1 mΩ were demonstrated at 10 GHz and 79K. The results show great promise for the realization of effective high-Tc superconductive passive microwave components in the near future.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. Belohoubek, D. Kalokitis, A. Fathy, V. Pendrick, R. Brown, J. Matey, L. Nazar, B. Wilkens, T. Venkatesan, A. Inam, X. D. Wu, and B. Dutta "Microwave Measurements on Patterned High Temperature Superconducting Thin Film Circuits", Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); https://doi.org/10.1117/12.965177
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Cited by 12 scholarly publications.
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KEYWORDS
Microwave radiation

Resistance

Superconductors

Thin films

Dielectrics

Inductance

Optical lithography

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