Open Access Paper
19 November 2021 Design and verification of micro/nano probes for coordinate measuring machines (Withdrawal Notice)
Author Affiliations +
Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 120591Q (2021) https://doi.org/10.1117/12.2613440
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China
Abstract
Publisher’s Note: This paper, originally published on 19 November 2021 was withdrawn on 30 November 2021 per author request.
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peng Xu, Rui Jun Li, Xiao Yu Feng, and Kuang Chao Fan "Design and verification of micro/nano probes for coordinate measuring machines (Withdrawal Notice)", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 120591Q (19 November 2021); https://doi.org/10.1117/12.2613440
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KEYWORDS
Sensors

Digital video discs

Head

Mirrors

Michelson interferometers

Glasses

Optical sensors

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