Ultra-precision detection of surface defects of large aperture diffraction grating based on machine vision

Haotian Wang; Chaoming Li; Xinrong Chen; Zhe Huang; Jiayao Pan; Tao Wu

doi:10.1117/12.2606743

24 November 2021 Ultra-precision detection of surface defects of large aperture diffraction grating based on machine vision

Haotian Wang, Chaoming Li, Xinrong Chen, Zhe Huang, Jiayao Pan, Tao Wu

Author Affiliations +

Proceedings Volume 12069, AOPC 2021: Novel Technologies and Instruments for Astronomical Multi-Band Observations; 1206910 (2021) https://doi.org/10.1117/12.2606743
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

Diffraction grating is an important optical device whose surface defects will seriously affect the quality of optical system.In order to achieve the diffraction grating of the ultra precision surface defect inspection, design a set of defects automatic detection system based on machine vision, we use black hat transform images highlight several images, and after a Canny edge detection, expansion, corrosion, determine the connected domain, look for the seed point, the algorithm of region growing process, realize the defect feature extraction, classification and statistics.A two-dimension displacement platform controlled by DSP is designed to realize the panoramic image Mosaic of diffraction grating and accurately locate the coordinates of defects.At the same time, the surface quality of the grating is evaluated according to the American military optical appearance standard MIL-PRF-13830B.

Citation Download Citation

Haotian Wang, Chaoming Li, Xinrong Chen, Zhe Huang, Jiayao Pan, and Tao Wu "Ultra-precision detection of surface defects of large aperture diffraction grating based on machine vision", Proc. SPIE 12069, AOPC 2021: Novel Technologies and Instruments for Astronomical Multi-Band Observations, 1206910 (24 November 2021); https://doi.org/10.1117/12.2606743

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