A study of ultra-precision raster milling of optical freeform surfaces

Renxian Zhou; Lingbao Kong

doi:10.1117/12.2617337

15 February 2022 A study of ultra-precision raster milling of optical freeform surfaces

Renxian Zhou, Lingbao Kong

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 121664O (2022) https://doi.org/10.1117/12.2617337
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

Freeform surface has been widely applied to various optical components which require a surface quality with submicrometer form accuracy and nanometric surface finish. Currently the achievement of such ultra-precision surface quality relies largely on the skills and experience of the operator based on a trial-and-error approach, which is a time consuming and expensive process. Ultra-precision raster milling is an enabling technology to generate freeform surfaces with the optical surface quality without any subsequent processing. This paper presents the fundamental knowledge about ultra-precision raster milling, including the cutting mechanism, cutting strategies, cutting path plans, tool path generation and hence a slide motion error model has been established to predict the form error generation. A series of experimental studies have been undertaken and the prediction results were found to agree well with the measured values.

Citation Download Citation

Renxian Zhou and Lingbao Kong "A study of ultra-precision raster milling of optical freeform surfaces", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 121664O (15 February 2022); https://doi.org/10.1117/12.2617337

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