Fabrication of bent crystal analyzer for high energy-resolution x-ray spectroscopy

Xing Liu; Dawei Zhang; Xuanqi Zeng; Kaiyu Zhang; Peng Liu; Tsu-Chien Weng

doi:10.1117/12.2617924

15 February 2022 Fabrication of bent crystal analyzer for high energy-resolution x-ray spectroscopy

Xing Liu, Dawei Zhang, Xuanqi Zeng, Kaiyu Zhang, Peng Liu, Tsu-Chien Weng

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 1216674 (2022) https://doi.org/10.1117/12.2617924
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

X-ray spectroscopy is an important technique for studying the material electronic structure, oxidation state and coordination, which have wide applications in energy catalysis, environmental science fields. The crystals diffract X-rays because their internal atoms are spatially ordered and the lattice spacing is on the nanometer scale, which is similar to the X-ray wavelength. In this paper, a technique based on bending and epoxy adhesive is proposed to fabricate a bent crystal analyzer. The radius of convex surface is 1‰ smaller than the concave one. The wafers and spherical substrates were cleaned with acetone and ethanol in an ultra-clean room. To remove residual organic compounds, UV ozone cleaning procedure should be used. The results show that the measured curvature radius of the bent crystal analyzer is 1000.550 mm; the surface RMS of the surface is 1.34λ and the energy resolution is better than 5 eV, which can distinguish Cu Kα₁ and Kα₂ fluorescence lines.

Citation Download Citation

Xing Liu, Dawei Zhang, Xuanqi Zeng, Kaiyu Zhang, Peng Liu, and Tsu-Chien Weng "Fabrication of bent crystal analyzer for high energy-resolution x-ray spectroscopy", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 1216674 (15 February 2022); https://doi.org/10.1117/12.2617924

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