Research on the uniformity of the nano-grating pitch based on comparative measurement

Xinyuan Zou; Zhiping Zhang; Xiaofeng Yang; Chen Zhang

doi:10.1117/12.2648781

14 October 2022 Research on the uniformity of the nano-grating pitch based on comparative measurement

Xinyuan Zou, Zhiping Zhang, Xiaofeng Yang, Chen Zhang

Proceedings Volume 12343, 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022); 123431Z (2022) https://doi.org/10.1117/12.2648781
Event: 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022), 2022, Qingdao, China

Abstract

The grating pitch is an essential structural parameter of the grating. In the precision displacement measurement system, the grating pitch as the measurement reference directly affects the measurement results. In order to ensure the accuracy of the measurement, the grating pitch needs to be detected. Based on the laser interference principle and grating diffraction principle, this paper proposes a new method to convert the grating pitch into interferometer and grating displacement comparison during the grating motion. The experimental results show that the measurement error is less than 1.2 nm and the uniformity error is less than 0.34 for the grating with 833 nm pitch, which verifies the method's feasibility.

Citation Download Citation

Xinyuan Zou, Zhiping Zhang, Xiaofeng Yang, and Chen Zhang "Research on the uniformity of the nano-grating pitch based on comparative measurement", Proc. SPIE 12343, 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022), 123431Z (14 October 2022); https://doi.org/10.1117/12.2648781

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