Scanning overlapped phase interference lithography system for manufacturing optical waveguide combiner

Yohei Nawaki; Kentaro Nomoto; Shunta Sugisaki; Shinji Orihara; Kazuyuki Tsuruoka

doi:10.1117/12.2667155

16 March 2023 Scanning overlapped phase interference lithography system for manufacturing optical waveguide combiner

Yohei Nawaki, Kentaro Nomoto, Shunta Sugisaki, Shinji Orihara, Kazuyuki Tsuruoka

Proceedings Volume 12449, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV; 1244907 (2023) https://doi.org/10.1117/12.2667155
Event: SPIE AR | VR | MR, 2023, San Francisco, California, United States

Abstract

We have been developing Scanning Overlapped Phase Interference Lithography (SOPHIL) system which can provide an excellent grid pitch uniformity, 380 nm+-0.005 nm over the entire 200 mm diameter substrate. The SOPHIL method consists of two steps. As the first step, a spot fringe pattern generated by two-beam interference is scanned direction along the grid on the wafer. As the second step, the spot is moved just the integer multiple length of its fringe period, then the spot is exposed again over the 1st fringe pattern. We achieved the pitch uniformity of +-0.002%, and also 180 nm pitch pattern was confirmed.

Conference Presentation

Citation Download Citation

Yohei Nawaki, Kentaro Nomoto, Shunta Sugisaki, Shinji Orihara, and Kazuyuki Tsuruoka "Scanning overlapped phase interference lithography system for manufacturing optical waveguide combiner", Proc. SPIE 12449, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV, 1244907 (16 March 2023); https://doi.org/10.1117/12.2667155

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available