In-process surface metrology for thin film flexible electronic devices

Liam Blunt; Hussam Muhamedsalih; Mothana Hassan; David Bird; Dan Kolb; Prashant Kumar; Dawei Tang; James Williamson

doi:10.1117/12.2657501

25 April 2023 In-process surface metrology for thin film flexible electronic devices

Liam Blunt, Hussam Muhamedsalih, Mothana Hassan, David Bird, Dan Kolb, Prashant Kumar, Dawei Tang, James Williamson

Proceedings Volume 12490, Surface Engineering and Forensics; 1249007 (2023) https://doi.org/10.1117/12.2657501
Event: SPIE Smart Structures + Nondestructive Evaluation, 2023, Long Beach, California, United States

Abstract

Thin film flexible electronics refer to a class of electronic devices built on flexible substrates. Examples includes printed Li batteries, Thin film flexible electronics refer to a class of electronic devices manufactured by multiple layering and scribing on flexible polymer substrates. Examples of such devices includes printed Li batteries, flexible photovoltaic cells and light emitting diodes. These devices are often mass manufactured by Roll-to-Roll processing (R2R). Whilst the basic technology is well established, the increasing demands on precision environmental protection and multi layering of devices means that in-process measurement of printed surface features is a critical bottle neck in terms of developing R2R as a process route. The purpose of the present paper is to review the current critical dimensional metrology needs in R2R manufacture and in particular to highlight the development of a new inprocess surface metrology system based on Multi-wavelength Polarizing Interferometry (MPI). The system is capable of measurement in real time, is environmentally robust and has nanometre resolution. The paper concludes by highlighting an example of the first trial implementation of the MPI on a production level R2R machine and discussed issues with quantification of film dimensions and associated signal processing

Conference Presentation

Citation Download Citation

Liam Blunt, Hussam Muhamedsalih, Mothana Hassan, David Bird, Dan Kolb, Prashant Kumar, Dawei Tang, and James Williamson "In-process surface metrology for thin film flexible electronic devices", Proc. SPIE 12490, Surface Engineering and Forensics, 1249007 (25 April 2023); https://doi.org/10.1117/12.2657501

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