CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 12589 > Article
Paper
14 February 2023 Design of a high performance Sn-doped ZnO thin film MSM UV photodetector
Yantao Liu, Wenxia Wang, Jianping Ma
Author Affiliations +
Proceedings Volume 12589, International Conference on Optical Technology, Semiconductor Materials, and Devices (OTSMD 2022); 1258908 (2023) https://doi.org/10.1117/12.2668855
Event: International Conference on Optical Technology, Semiconductor Materials, and Devices (OTSMD 2022), 2022, Longyan, China
Abstract
Sn-doped ZnO thin film was prepared to enhance its photoelectric performance, and the ZnO based photodetector was fabricated by co-sputtering method. The I-V characteristic of the detector under different Sn doped DC sputtering power, the ultraviolet light source was set at 365 nm with 0.5 mW power. The examined photodetector performance manifest that optimum Sn doping level is investigated at 15 W, the maximum photocurrent and spectral responsivity are obtained to be 4.39 mA and 24.4 A/W, the fastest time response is obtained to be tr=29.0 ms and tf =33.2 ms.
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Yantao Liu, Wenxia Wang, and Jianping Ma "Design of a high performance Sn-doped ZnO thin film MSM UV photodetector", Proc. SPIE 12589, International Conference on Optical Technology, Semiconductor Materials, and Devices (OTSMD 2022), 1258908 (14 February 2023); https://doi.org/10.1117/12.2668855
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 6 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Sputter deposition
Tin
Zinc oxide
Doping
Photodetectors
Thin films
Dark current
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top